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Modal Quality Factor Inversion of Non-Slender Mems Resonato..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Gesing, Andre L. ; Tran, Thomas ; Platz, Daniel. - p. 1072-1075 , 2023
Link: https://doi.org/10.1109/MEMS49605.2023.10052411