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Towards Ultra-High Spatial Resolution Sensing of GHz Ultras..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Sanghvi, Rohan ; Kuo, Justin ; Ravi, Adarsh. - p. 9-12 , 2023
Link: https://doi.org/10.1109/MEMS49605.2023.10052433