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Characterizing Inductively-Coupled-Plasma Etching of Single..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Majd, Yasaman ; Castro, Jorge Manrique ; Mansoorzare, Hakhamanesh. - p. 586-589 , 2023
Link: https://doi.org/10.1109/MEMS49605.2023.10052441