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1 Ergebnisse
1
Suppression of Spurious Modes in Aluminum Nitride S1 Lamb W..:
, In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Tung, Shao-Siang
;
Hsu, Tzu-Hsuan
;
Ho, Yens
... - p. 1198-1201 , 2023
Link:
https://doi.org/10.1109/MEMS49605.2023.10052454
RT T1 <cTitle>2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Suppression of Spurious Modes in Aluminum Nitride S1 Lamb Wave Resonators Using A Mechanical Soft-Contact Scheme</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10052454&Exemplar=1&LAN=DE A1 Tung, Shao-Siang A1 Hsu, Tzu-Hsuan A1 Ho, Yens A1 Chen, Yung-Hsiang A1 Pradeep, Yelehanka R. A1 Chand, Rakesh A1 Li, Ming-Huang YR 2023 SN 2160-1968 K1 Couplings K1 Vibrations K1 Deformation K1 Energy dissipation K1 Acoustics K1 Resonators K1 III-V semiconductor materials K1 Aluminum nitride (AlN) K1 microelectromechanical system (MEMS) K1 resonator K1 Lamb wave K1 mechanical soft contact K1 spurious mode SP 1198 OP 1201 LK http://dx.doi.org/https://doi.org/10.1109/MEMS49605.2023.10052454 DO https://doi.org/10.1109/MEMS49605.2023.10052454 SF ELIB - SuUB Bremen
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