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1 Ergebnisse
1
Detection Limits in Nanomechanical Mass Flow Sensing for Na..:
, In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Escobar, Javier E.
;
Molina, Juan
;
Gil-Santos, Eduardo
... - p. 1056-1059 , 2023
Link:
https://doi.org/10.1109/MEMS49605.2023.10052471
RT T1 <cTitle>2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Detection Limits in Nanomechanical Mass Flow Sensing for Nanofluidics With Nanowire Open Channels</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10052471&Exemplar=1&LAN=DE A1 Escobar, Javier E. A1 Molina, Juan A1 Gil-Santos, Eduardo A1 Ruz, Jose J. A1 Malvar, Oscar A1 Kosaka, Priscila M. A1 Tamayo, Javier A1 Paulo, Alvaro San A1 Calleja, Montserrat YR 2023 SN 2160-1968 K1 Printing K1 Semiconductor device measurement K1 Liquids K1 Electric variables measurement K1 Reservoirs K1 Silicon K1 Sensor systems K1 Semiconductor nanowires K1 NEMS K1 nanomechanical resonators K1 nanofluidics K1 open fluidics K1 ionic liquids SP 1056 OP 1059 LK http://dx.doi.org/https://doi.org/10.1109/MEMS49605.2023.10052471 DO https://doi.org/10.1109/MEMS49605.2023.10052471 SF ELIB - SuUB Bremen
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