I agree that this site is using cookies. You can find further informations here.
X
Merkliste 
 1 Ergebnisse 
 
1

A CMOS-MEMS Beam Resonator with Q > 10,000:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Chen, Ting-Yi ; Li, Wei-Chang - p. 1151-1154 , 2023
Link: https://doi.org/10.1109/MEMS49605.2023.10052474