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Hierarchical Bonding Yield Test Structure for Flexible High..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Odenthal, Marie C. ; Claar, Victor ; Paul, Oliver. - p. 409-412 , 2023
Link: https://doi.org/10.1109/MEMS49605.2023.10052500