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1 Ergebnisse
1
Andromeda: A Flexible MEMS Technology Platform for a Variet..:
, In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Martini, Irene
;
Alessandri, Anna
;
Carminati, Marta
... - p. 716-719 , 2023
Link:
https://doi.org/10.1109/MEMS49605.2023.10052507
RT T1 <cTitle>2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Andromeda: A Flexible MEMS Technology Platform for a Variety of Piezoelectrically Actuacted Micromirrors</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10052507&Exemplar=1&LAN=DE A1 Martini, Irene A1 Alessandri, Anna A1 Carminati, Marta A1 Carminati, Roberto A1 Ferrarini, Paolo A1 Gatti, Daniela A. L. A1 Gianola, Riccardo A1 Lazarova, Borka A1 Lazzari, Carla M. A1 Nomellini, Andrea A1 Oggioni, Laura A1 Pedrini, Claudia A1 Prelini, Carlo L. A1 Tacchini, Riccardo A1 Vimercati, Michele YR 2023 SN 2160-1968 K1 Micromechanical devices K1 Laser radar K1 Piezoelectric materials K1 Resonant frequency K1 Manufacturing K1 Micromirrors K1 MEMS scanner K1 MEMS mirror K1 PZT K1 piezoelectric K1 AR/MR K1 LiDAR SP 716 OP 719 LK http://dx.doi.org/https://doi.org/10.1109/MEMS49605.2023.10052507 DO https://doi.org/10.1109/MEMS49605.2023.10052507 SF ELIB - SuUB Bremen
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