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1 Ergebnisse
1
1-octadecanethiol Sam on CMOS-MEMS Gold-Plated Resonator vi..:
, In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Perello-Roig, Rafel
;
Verd, Jaume
;
Bota, Sebastia
... - p. 795-798 , 2023
Link:
https://doi.org/10.1109/MEMS49605.2023.10052527
RT T1
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
: T1
1-octadecanethiol Sam on CMOS-MEMS Gold-Plated Resonator via Dip-Cast for VOCS Sensing
UL https://suche.suub.uni-bremen.de/peid=ieee-10052527&Exemplar=1&LAN=DE A1 Perello-Roig, Rafel A1 Verd, Jaume A1 Bota, Sebastia A1 Soberats, Bartomeu A1 Costa, Antonio A1 Segura, Jaume YR 2023 SN 2160-1968 K1 Micromechanical devices K1 Gold K1 Electric potential K1 Resonant frequency K1 CMOS technology K1 Sensors K1 Medical diagnosis K1 MEMS resonators K1 VOCs K1 CMOS-MEMS K1 Lab-on- Chip K1 Self-Assembled Monolayer K1 Gas sensor K1 ENIG SP 795 OP 798 LK http://dx.doi.org/https://doi.org/10.1109/MEMS49605.2023.10052527 DO https://doi.org/10.1109/MEMS49605.2023.10052527 SF ELIB - SuUB Bremen
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