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1 Ergebnisse
1
Periodic Cavities on the IR-Absorber for Responsivity Enhan..:
, In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Li, Yung-Chen
;
Chou, Tien
;
Lin, Pen-Sheng
... - p. 1143-1146 , 2023
Link:
https://doi.org/10.1109/MEMS49605.2023.10052530
RT T1 <cTitle>2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Periodic Cavities on the IR-Absorber for Responsivity Enhancement of CMOS-MEMS Thermoelectric IR Sensor</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10052530&Exemplar=1&LAN=DE A1 Li, Yung-Chen A1 Chou, Tien A1 Lin, Pen-Sheng A1 Huang, Yu -Cheng A1 Shih, Fuchi A1 Lin, You -An A1 Yen, Da-Jen A1 Lai, Mei-Feng A1 Fang, Weileun YR 2023 SN 2160-1968 K1 Temperature measurement K1 Temperature sensors K1 Thermoelectric materials K1 Temperature distribution K1 Absorption K1 Optical design K1 Wavelength measurement K1 CMOS-MEMS K1 thermoelectric infrared sensor K1 IR-absorber K1 periodic cavities K1 responsivity SP 1143 OP 1146 LK http://dx.doi.org/https://doi.org/10.1109/MEMS49605.2023.10052530 DO https://doi.org/10.1109/MEMS49605.2023.10052530 SF ELIB - SuUB Bremen
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