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1 Ergebnisse
1
Wideband and Highly Sensitive Micromachined PZT Film-Based ..:
, In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Huang, Chung-Hao
;
Feng, Guo-Hua
- p. 981-984 , 2023
Link:
https://doi.org/10.1109/MEMS49605.2023.10052534
RT T1 <cTitle>2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Wideband and Highly Sensitive Micromachined PZT Film-Based Ultrasonic Microphone with Parylene Film and Flexible Helmholtz Resonator Enhancement</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10052534&Exemplar=1&LAN=DE A1 Huang, Chung-Hao A1 Feng, Guo-Hua YR 2023 SN 2160-1968 K1 Micromechanical devices K1 Time-frequency analysis K1 Sensitivity K1 Titanium K1 Acoustics K1 Residual stresses K1 Structural beams K1 Piezoelectric K1 micromachining K1 Helmholtz resonator K1 paylene K1 ultrasonic microphone SP 981 OP 984 LK http://dx.doi.org/https://doi.org/10.1109/MEMS49605.2023.10052534 DO https://doi.org/10.1109/MEMS49605.2023.10052534 SF ELIB - SuUB Bremen
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