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1 Ergebnisse
1
MEMS First-Order Bessel Beam Acoustic Transducer for Partic..:
, In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Li, Jiaqi
;
Sun, Zhenhuan
;
Jia, Yuyu
... - p. 965-968 , 2023
Link:
https://doi.org/10.1109/MEMS49605.2023.10052542
RT T1 <cTitle>2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>MEMS First-Order Bessel Beam Acoustic Transducer for Particle Trapping And Controllable Rotating</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10052542&Exemplar=1&LAN=DE A1 Li, Jiaqi A1 Sun, Zhenhuan A1 Jia, Yuyu A1 Li, Teng A1 Lu, Haojian A1 Zhao, Lurui A1 Liu, Hai A1 Liu, Song YR 2023 SN 2160-1968 K1 Micromechanical devices K1 Fabrication K1 Particle beams K1 Acoustic transducers K1 Spirals K1 Voltage K1 Resists K1 MEMS acoustic transducer K1 acoustic Bessel beam K1 soft lithography K1 PDMS K1 acoustic manipulation K1 BBAT SP 965 OP 968 LK http://dx.doi.org/https://doi.org/10.1109/MEMS49605.2023.10052542 DO https://doi.org/10.1109/MEMS49605.2023.10052542 SF ELIB - SuUB Bremen
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