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1 Ergebnisse
1
Resonant Confiners for Acoustic Loss Mitigation in Bulk Aco..:
, In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Segovia-Fernandez, Jeronimo
;
Yen, Ernest T.-T.
- p. 165-168 , 2023
Link:
https://doi.org/10.1109/MEMS49605.2023.10052545
RT T1
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
: T1
Resonant Confiners for Acoustic Loss Mitigation in Bulk Acoustic Wave Resonators
UL https://suche.suub.uni-bremen.de/peid=ieee-10052545&Exemplar=1&LAN=DE A1 Segovia-Fernandez, Jeronimo A1 Yen, Ernest T.-T. YR 2023 SN 2160-1968 K1 Electrodes K1 Q-factor K1 Micromechanical devices K1 Shape K1 Metals K1 Resonant frequency K1 Finite element analysis K1 BAW resonator K1 acoustic energy losses K1 antisymmetric mode K1 resonant confiners SP 165 OP 168 LK http://dx.doi.org/https://doi.org/10.1109/MEMS49605.2023.10052545 DO https://doi.org/10.1109/MEMS49605.2023.10052545 SF ELIB - SuUB Bremen
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