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1 Ergebnisse
1
Multiple Parameter Decoupling Using a Single Resonant MEMS ..:
, In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Xi, Jingqian
;
Xu, Lei
;
Wang, Yuan
... - p. 917-920 , 2023
Link:
https://doi.org/10.1109/MEMS49605.2023.10052550
RT T1 <cTitle>2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Multiple Parameter Decoupling Using a Single Resonant MEMS Sensor via Blue Sideband Excitation</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10052550&Exemplar=1&LAN=DE A1 Xi, Jingqian A1 Xu, Lei A1 Wang, Yuan A1 Hu, Fangjing A1 Li, Chengxin A1 Wang, Linlin A1 Liu, Huafeng A1 Wang, Chen A1 Kraft, Michael A1 Zhao, Chun YR 2023 SN 2160-1968 K1 Temperature sensors K1 Micromechanical devices K1 Temperature measurement K1 Vibrations K1 Electric potential K1 Fluctuations K1 Perturbation methods K1 Multiple parameter decoupling K1 blue-sideband excitation K1 micro-resonator K1 parametric resonance SP 917 OP 920 LK http://dx.doi.org/https://doi.org/10.1109/MEMS49605.2023.10052550 DO https://doi.org/10.1109/MEMS49605.2023.10052550 SF ELIB - SuUB Bremen
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