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1 Ergebnisse
1
Integration of a High Temperature Transition Metal Oxide NT..:
, In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Risquez, Sarah
;
Redolfi, Sebastian
;
Fleury, Clement
... - p. 1139-1142 , 2023
Link:
https://doi.org/10.1109/MEMS49605.2023.10052556
RT T1 <cTitle>2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10052556&Exemplar=1&LAN=DE A1 Risquez, Sarah A1 Redolfi, Sebastian A1 Fleury, Clement A1 Wulf, Matthias A1 Roshanghias, Ali A1 Piot, Adrien A1 Streque, Jeremy A1 Schmoltner, Kerstin A1 Dao, Thang Duy A1 Puff, Markus A1 Moridi, Mohssen YR 2023 SN 2160-1968 K1 Temperature sensors K1 Micromechanical devices K1 Temperature K1 Thermal resistance K1 Metals K1 Thermistors K1 Silicon nitride K1 Metal oxide thin film K1 negative temperature coefficient resistance thermistor K1 microbolometer K1 infrared detector micromachining SP 1139 OP 1142 LK http://dx.doi.org/https://doi.org/10.1109/MEMS49605.2023.10052556 DO https://doi.org/10.1109/MEMS49605.2023.10052556 SF ELIB - SuUB Bremen
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