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1 Ergebnisse
1
Monolithic Integration of PZT Actuation Units of Various Ac..:
, In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Cheng, Hsu-Hsiang
;
Lo, Sung-Cheng
;
Chen, Yu-Chen
... - p. 685-688 , 2023
Link:
https://doi.org/10.1109/MEMS49605.2023.10052557
RT T1 <cTitle>2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Monolithic Integration of PZT Actuation Units of Various Activated Resonances for Full-Range Mems Speaker Array</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10052557&Exemplar=1&LAN=DE A1 Cheng, Hsu-Hsiang A1 Lo, Sung-Cheng A1 Chen, Yu-Chen A1 Cheng, Ming-Ching A1 Wei, Ting-Chou A1 Wu, Mingching A1 Fang, Weileun YR 2023 SN 2160-1968 K1 Micromechanical devices K1 Electrodes K1 Voltage measurement K1 Bridge circuits K1 Monolithic integrated circuits K1 Micromachining K1 Ear K1 MEMS speaker array K1 piezoelectric K1 PZT K1 full range SP 685 OP 688 LK http://dx.doi.org/https://doi.org/10.1109/MEMS49605.2023.10052557 DO https://doi.org/10.1109/MEMS49605.2023.10052557 SF ELIB - SuUB Bremen
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