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Broadband MEMS Speaker by Single-Way Multi-Resonance Array ..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Sun, Mingchao ; Zhang, Menglun ; Liu, Chengze. - p. 677-680 , 2023
Link: https://doi.org/10.1109/MEMS49605.2023.10052570