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1 Ergebnisse
1
Implementation of a Monolithic SoC Environmental Sensing Hu..:
, In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Lee, Ya-Chu
;
Chien, Tung-Lin
;
Fang, Chi-Te
... - p. 562-565 , 2023
Link:
https://doi.org/10.1109/MEMS49605.2023.10052584
RT T1 <cTitle>2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Implementation of a Monolithic SoC Environmental Sensing Hub Using CMOS-MEMS Technique</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10052584&Exemplar=1&LAN=DE A1 Lee, Ya-Chu A1 Chien, Tung-Lin A1 Fang, Chi-Te A1 Huang, Yuanyuan A1 Sung, Wei-Lun A1 Chu, Yen-Chang A1 Chen, Rongshun A1 Fang, Weileun YR 2023 SN 2160-1968 K1 Micromechanical devices K1 Semiconductor device measurement K1 Thermometers K1 Sensitivity K1 Fluid flow measurement K1 Wavelength measurement K1 Humidity K1 Environment sensing hub K1 CMOS-MEMS K1 Gas sensor K1 Thermometer K1 Anemometer K1 Humidity sensor K1 Visible light sensor SP 562 OP 565 LK http://dx.doi.org/https://doi.org/10.1109/MEMS49605.2023.10052584 DO https://doi.org/10.1109/MEMS49605.2023.10052584 SF ELIB - SuUB Bremen
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