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A Thermal Airflow Sensor Based on Mn-Co-Ni-O Thin Film:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Wang, Jie ; Liu, Yunfei ; Zhu, Zhezheng... - p. 756-759 , 2023
Link: https://doi.org/10.1109/MEMS49605.2023.10052597