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1 Ergebnisse
1
Two-Axis Electromagnetic Scanner Integrated with an Electro..:
, In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Okamoto, Yuki
;
Okada, Hironao
;
Ichiki, Masaaki
- p. 41-44 , 2023
Link:
https://doi.org/10.1109/MEMS49605.2023.10052600
RT T1 <cTitle>2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Two-Axis Electromagnetic Scanner Integrated with an Electrostatic XY-Stage Positioner</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10052600&Exemplar=1&LAN=DE A1 Okamoto, Yuki A1 Okada, Hironao A1 Ichiki, Masaaki YR 2023 SN 2160-1968 K1 Micromechanical devices K1 Lasers K1 Electromagnetic forces K1 Mirrors K1 Electromagnetics K1 Electrostatics K1 Electrostatic actuators K1 MEMS Scanner K1 stabilizer K1 positioner K1 comb-drive actuator K1 electromagnetic actuator SP 41 OP 44 LK http://dx.doi.org/https://doi.org/10.1109/MEMS49605.2023.10052600 DO https://doi.org/10.1109/MEMS49605.2023.10052600 SF ELIB - SuUB Bremen
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