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1 Ergebnisse
1
Investigation of the effect of multiple oxidation and ion s..:
, In:
2023 5th International Youth Conference on Radio Electronics, Electrical and Power Engineering (REEPE)
,
Lubenchenko, Alexandr V.
;
Ivanov, Dmitry A.
;
Lukiantsev, Denis S.
.. - p. 1-5 , 2023
Link:
https://doi.org/10.1109/REEPE57272.2023.10086730
RT T1
2023 5th International Youth Conference on Radio Electronics, Electrical and Power Engineering (REEPE)
: T1
Investigation of the effect of multiple oxidation and ion sputtering on the formation of inhomogeneous oxide layers on the surface of an ultrathin metal film
UL https://suche.suub.uni-bremen.de/peid=ieee-10086730&Exemplar=1&LAN=DE A1 Lubenchenko, Alexandr V. A1 Ivanov, Dmitry A. A1 Lukiantsev, Denis S. A1 Smirnov, Mikhail B. A1 Pavlov, Oleg N. YR 2023 SN 2831-7262 K1 Spectroscopy K1 Films K1 Atmospheric modeling K1 Ions K1 Nonhomogeneous media K1 Oxidation K1 Sputtering K1 metal oxide films K1 controlled film formation K1 layered chemical and phase analysis K1 X-ray photoelectron spectroscopy SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/REEPE57272.2023.10086730 DO https://doi.org/10.1109/REEPE57272.2023.10086730 SF ELIB - SuUB Bremen
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