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1 Ergebnisse
1
Improving Performance of FBARs by Advanced Low-Temperature ..:
, In:
2023 35th International Conference on Microelectronic Test Structure (ICMTS)
,
Tu, Yu-Fa
;
Chang, Ting-Chang
;
Zhou, Kuan-Ju
... - p. 1-4 , 2023
Link:
https://doi.org/10.1109/ICMTS55420.2023.10094148
RT T1 <cTitle>2023 35th International Conference on Microelectronic Test Structure (ICMTS)</cTitle>: T1 <Title>Improving Performance of FBARs by Advanced Low-Temperature High-Pressure Technology</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10094148&Exemplar=1&LAN=DE A1 Tu, Yu-Fa A1 Chang, Ting-Chang A1 Zhou, Kuan-Ju A1 Hung, Wei-Chun A1 Kuo, Ting-Tzu A1 Lien, Chen-Hsin YR 2023 SN 2158-1029 K1 Q-factor K1 Solvents K1 Fluids K1 Piezoelectric materials K1 Surface tension K1 Etching K1 Reflection coefficient K1 supercritical fluid (SCF) K1 thin film bulk acoustic resonator (FBAR) K1 piezoelectric material SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/ICMTS55420.2023.10094148 DO https://doi.org/10.1109/ICMTS55420.2023.10094148 SF ELIB - SuUB Bremen
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