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1 Ergebnisse
1
An Electrical Inline-Testable Structure to Monitor Gate-Sou..:
, In:
2023 35th International Conference on Microelectronic Test Structure (ICMTS)
,
Zhu, Hai
;
Onishi, Katsunori
;
Wu, Stephen
... - p. 1-4 , 2023
Link:
https://doi.org/10.1109/ICMTS55420.2023.10094149
RT T1 <cTitle>2023 35th International Conference on Microelectronic Test Structure (ICMTS)</cTitle>: T1 <Title>An Electrical Inline-Testable Structure to Monitor Gate-Source/Drain Short Defect Caused by Imperfect Fin-Cut Patterning in FinFET Technology</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10094149&Exemplar=1&LAN=DE A1 Zhu, Hai A1 Onishi, Katsunori A1 Wu, Stephen A1 Yang, Adam A1 Jeong, Byoung-Wook A1 Lim, Seong-Joon A1 Jing, Nan A1 Lee, Choong-Ho A1 Conrady, David A1 Chidambarrao, Dureseti YR 2023 SN 2158-1029 K1 Integrated circuits K1 Systematics K1 Layout K1 Failure analysis K1 Logic gates K1 FinFETs K1 Silicon K1 MOSFET K1 FinFET K1 Defect K1 Inline Test K1 Electrical Test K1 Layout Design SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/ICMTS55420.2023.10094149 DO https://doi.org/10.1109/ICMTS55420.2023.10094149 SF ELIB - SuUB Bremen
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