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1 Ergebnisse
1
High-performance Aluminum Scandium Nitride MEMS energy harv..:
, In:
2023 IEEE International Conference on Mechatronics (ICM)
,
Dankwort, Torben
;
Ahmed, Minhaz
;
Grunzig, Sven
.. - p. 1-4 , 2023
Link:
https://doi.org/10.1109/ICM54990.2023.10101917
RT T1
2023 IEEE International Conference on Mechatronics (ICM)
: T1
High-performance Aluminum Scandium Nitride MEMS energy harvester with wafer-level integrated micromagnets for contactless rotational motion harvesting
UL https://suche.suub.uni-bremen.de/peid=ieee-10101917&Exemplar=1&LAN=DE A1 Dankwort, Torben A1 Ahmed, Minhaz A1 Grunzig, Sven A1 Khare, Anmol A1 Gojdka, Bjorn YR 2023 K1 Micromechanical devices K1 Degradation K1 Mechatronics K1 Piezoelectric transducers K1 Scandium K1 Broadband communication K1 Monitoring K1 MEMS energy harvesting K1 magnetic plucking K1 AlScN K1 machine monitoring K1 IoT K1 IIoT SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/ICM54990.2023.10101917 DO https://doi.org/10.1109/ICM54990.2023.10101917 SF ELIB - SuUB Bremen
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