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1 Ergebnisse
1
Characterization of Oxide Interface Charges in Trench Field..:
, In:
2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
,
Sim, Zhi Lin
;
Chin, Wei Mien
;
Bong, Yi Xiang
.. - p. 1-3 , 2023
Link:
https://doi.org/10.1109/EDTM55494.2023.10102939
RT T1 <cTitle>2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)</cTitle>: T1 <Title>Characterization of Oxide Interface Charges in Trench Field Stop IGBT</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10102939&Exemplar=1&LAN=DE A1 Sim, Zhi Lin A1 Chin, Wei Mien A1 Bong, Yi Xiang A1 Goh, David A1 Ngwan, Voon Cheng YR 2023 K1 Insulated gate bipolar transistors K1 Performance evaluation K1 Degradation K1 Annealing K1 Ions K1 Etching K1 Plasmas K1 Trench Power Device K1 Oxide Interface Charges K1 Forming Gas Annealing SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/EDTM55494.2023.10102939 DO https://doi.org/10.1109/EDTM55494.2023.10102939 SF ELIB - SuUB Bremen
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