I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Experimental results of adjusting membrane stress and sacri..:
, In:
2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
,
Choi, Ju Chan
;
Choi, Young Chan
;
Chang, Seok Jo
... - p. 1-3 , 2023
Link:
https://doi.org/10.1109/EDTM55494.2023.10102950
RT T1 <cTitle>2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)</cTitle>: T1 <Title>Experimental results of adjusting membrane stress and sacrificial layer thickness for targeting the pull-in voltage of capacitive MEMS microphone structure</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10102950&Exemplar=1&LAN=DE A1 Choi, Ju Chan A1 Choi, Young Chan A1 Chang, Seok Jo A1 Kim, Kwan Soo A1 Lee, Tae Won A1 Lee, Jae Hee YR 2023 K1 Micromechanical devices K1 Annealing K1 Tensile stress K1 Manufacturing processes K1 Costs K1 Layout K1 Voltage K1 MEMS K1 Capacitive Microphone SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/EDTM55494.2023.10102950 DO https://doi.org/10.1109/EDTM55494.2023.10102950 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)
