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A noble VFO(Vertical wire Fan Out) technology for small for..:

, In: 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM),
Sung, Ki-Jun ; Eun, Kyoungtae ; Lee, Seowon... - p. 1-4 , 2023
Link: https://doi.org/10.1109/EDTM55494.2023.10102966