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Reliability Prediction for Automotive 5nm and 7nm Technolog..:

, In: 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM),

Lee, Hyung Joo ; Kim, Dongin ; Choi, Sanghyun... - p. 1-3 , 2023

Link: https://doi.org/10.1109/EDTM55494.2023.10103011

RT 
T1 <cTitle>2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)</cTitle>: T1 <Title>Reliability Prediction for Automotive 5nm and 7nm Technology node by using Machine Learning based Solution</Title>

UL https://suche.suub.uni-bremen.de/peid=ieee-10103011&Exemplar=1&LAN=DE
				
A1 Lee, Hyung Joo
A1 Kim, Dongin
A1 Choi, Sanghyun
A1 Hong, Seungpyo
A1 Kwak, Doohwan
A1 Jayaram, Srividya
A1 Paek, Seungwon
A1 Kwon, Minho
A1 Kim, Yeongdo
A1 Jung, Hyobe
A1 Kissiov, Ivan
A1 Tao, Melody
A1 Torres, Andres
A1 Greeneltch, Nathan
A1 Lee, Ho
YR 2023
K1 Semiconductor device modeling
K1 Maximum likelihood estimation
K1 Semiconductor device measurement
K1 Semiconductor device reliability
K1 Process control
K1 Machine learning
K1 Predictive models
K1 Automotive semiconductor
K1 Reliability prediction
K1 Fab-data augmentation
K1 Process ranking
K1 Wafer screening
SP 1
OP 3
LK http://dx.doi.org/https://doi.org/10.1109/EDTM55494.2023.10103011
DO https://doi.org/10.1109/EDTM55494.2023.10103011
SF ELIB - SuUB Bremen

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