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1 Ergebnisse
1
A Study on the Thermal Budget of Ferroelectric TiN/Hf0.5Zr0..:
, In:
2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
,
Park, Hye Ryeon
;
Yoo, Jeong Gyu
;
Kang, Jong Mook
... - p. 1-3 , 2023
Link:
https://doi.org/10.1109/EDTM55494.2023.10103015
RT T1 <cTitle>2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)</cTitle>: T1 <Title>A Study on the Thermal Budget of Ferroelectric TiN/Hf0.5Zr0.5O2/TiN Capacitors for Next-Generation Memory Applications</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10103015&Exemplar=1&LAN=DE A1 Park, Hye Ryeon A1 Yoo, Jeong Gyu A1 Kang, Jong Mook A1 Cho, Min Kwan A1 Gong, Taeho A1 Park, Seongbin A1 Lee, Seungbin A1 Kim, Jin-HYun A1 Lee, Seojun A1 Choi, Rino A1 Kim, Harrison Sejoon A1 Jung, Yong Chan A1 Kim, Jiyoung A1 Kim, Si Joon YR 2023 K1 Annealing K1 Temperature K1 Nonvolatile memory K1 Furnaces K1 Capacitors K1 Memory management K1 Random access memory K1 Ferroelectricity K1 atomic layer deposition K1 Hf0.5Zr0.5O2 K1 MFM capacitor K1 thermal budget SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/EDTM55494.2023.10103015 DO https://doi.org/10.1109/EDTM55494.2023.10103015 SF ELIB - SuUB Bremen
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