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1 Ergebnisse
1
Quantitative Analysis of Tunnel Oxide Nitrogen Concentratio..:
, In:
2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
,
Lee, Jun-Young
;
Jung, Woo-Young
;
Cho, Jongkyu
... - p. 1-3 , 2023
Link:
https://doi.org/10.1109/EDTM55494.2023.10103039
RT T1 <cTitle>2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)</cTitle>: T1 <Title>Quantitative Analysis of Tunnel Oxide Nitrogen Concentration in 3D NAND using Low Acceleration Voltage, Low Current and Low Temperature STEM-EELS</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10103039&Exemplar=1&LAN=DE A1 Lee, Jun-Young A1 Jung, Woo-Young A1 Cho, Jongkyu A1 Oh, Jangwon A1 Kim, Jonghun A1 Choi, Minki YR 2023 K1 Temperature measurement K1 Atomic measurements K1 Accelerometers K1 Voltage measurement K1 Three-dimensional displays K1 Statistical analysis K1 Current measurement K1 Tunnel Oxide K1 Quantitative Analysis and 3D NAND SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/EDTM55494.2023.10103039 DO https://doi.org/10.1109/EDTM55494.2023.10103039 SF ELIB - SuUB Bremen
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