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1 Ergebnisse
1
Effects of In/Zn composition on the Performance of Ultra-th..:
, In:
2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
,
Liang, Yan-Kui
;
Zheng, June-Yang
;
Lin, Jing-Wei
... - p. 1-3 , 2023
Link:
https://doi.org/10.1109/EDTM55494.2023.10103052
RT T1
2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
: T1
Effects of In/Zn composition on the Performance of Ultra-thin Atomic Layer Deposited InxZnl-xO Channel Thin-Film Transistors
UL https://suche.suub.uni-bremen.de/peid=ieee-10103052&Exemplar=1&LAN=DE A1 Liang, Yan-Kui A1 Zheng, June-Yang A1 Lin, Jing-Wei A1 Hua, Yi Miao A1 Chou, Tsung-Te A1 Lu, Chun-Chieh A1 Huang, Huai-Ying A1 Lin, Yu-Ming A1 Kei, Chi-Chung A1 Chang, Edward-Yi A1 Lin, Chun-Hsiung YR 2023 K1 Performance evaluation K1 Fabrication K1 Electric potential K1 Annealing K1 Deconvolution K1 Fast Fourier transforms K1 Atomic layer deposition K1 InZnO TFT K1 ALD and BEOL SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/EDTM55494.2023.10103052 DO https://doi.org/10.1109/EDTM55494.2023.10103052 SF ELIB - SuUB Bremen
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