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1 Ergebnisse
1
The Top Electrode Tensile Stress Effect on Ferroelectricity..:
, In:
2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
,
Han, Runhao
;
Hong, Peizhen
;
Hou, JingWen
... - p. 1-4 , 2023
Link:
https://doi.org/10.1109/EDTM55494.2023.10103065
RT T1 <cTitle>2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)</cTitle>: T1 <Title>The Top Electrode Tensile Stress Effect on Ferroelectricity of Hf0.5Zr0.5O2 Thin Films</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10103065&Exemplar=1&LAN=DE A1 Han, Runhao A1 Hong, Peizhen A1 Hou, JingWen A1 Bao, Zhang A1 Xiong, Wenjuan A1 Yang, Shuai A1 Gao, Jianfeng A1 Liu, Fei A1 Huo, Zongliang YR 2023 K1 Electrodes K1 Tensile stress K1 Films K1 Tin K1 Residual stresses K1 Manufacturing K1 tensile stress K1 ferroelectric Hf0.5Zr0.5O2 K1 TiN thickness SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/EDTM55494.2023.10103065 DO https://doi.org/10.1109/EDTM55494.2023.10103065 SF ELIB - SuUB Bremen
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