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1 Ergebnisse
1
Strategy for Low Temperature HZO Ferroelectric Capacitors f..:
, In:
2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
,
Kim, Jin-Hyun
;
Lee, Minjong
;
Lee, Seojun
... - p. 1-3 , 2023
Link:
https://doi.org/10.1109/EDTM55494.2023.10103066
RT T1 <cTitle>2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)</cTitle>: T1 <Title>Strategy for Low Temperature HZO Ferroelectric Capacitors for Back-End of Line Applications</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10103066&Exemplar=1&LAN=DE A1 Kim, Jin-Hyun A1 Lee, Minjong A1 Lee, Seojun A1 Jung, Yong Chan A1 Chor, Rino A1 Kim, Hyun Jae A1 Kim, Si Joon A1 Kim, Jiyoung YR 2023 K1 Electrodes K1 Three-dimensional displays K1 Annealing K1 Ferroelectric materials K1 Capacitors K1 Crystallization K1 Temperature control K1 Low temperature K1 Hf0.5Zr0.5O2 K1 Atomic layer deposition K1 Ferroelectric K1 Back-end-of-line SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/EDTM55494.2023.10103066 DO https://doi.org/10.1109/EDTM55494.2023.10103066 SF ELIB - SuUB Bremen
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