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1 Ergebnisse
1
On the Dopant, Defect States, and Mobility in W Doped Amorp..:
, In:
2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
,
Hu, Yaoqiao
;
Aabrar, Khandker Akif
;
Palmieri, Andrea
... - p. 1-3 , 2023
Link:
https://doi.org/10.1109/EDTM55494.2023.10103082
RT T1
2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
: T1
On the Dopant, Defect States, and Mobility in W Doped Amorphous In2O3 for BEOL Transistors
UL https://suche.suub.uni-bremen.de/peid=ieee-10103082&Exemplar=1&LAN=DE A1 Hu, Yaoqiao A1 Aabrar, Khandker Akif A1 Palmieri, Andrea A1 Bergschneider, Matthew A1 Pesic, Milan A1 Young, Chadwin D. A1 Datta, Suman A1 Cho, Kyeongjae YR 2023 K1 Performance evaluation K1 Discrete Fourier transforms K1 Doping K1 Stability analysis K1 Semiconductor process modeling K1 Manufacturing K1 Transistors K1 IWO K1 BEOL transistor K1 defects SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/EDTM55494.2023.10103082 DO https://doi.org/10.1109/EDTM55494.2023.10103082 SF ELIB - SuUB Bremen
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