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Study on Sub-100-NM-Scale Measurement of Temperature Distri..:

, In: 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM),
Kato, Taro ; Tanaka, Takahisa ; Miyagishi, Hiromichi.. - p. 1-3 , 2023
Link: https://doi.org/10.1109/EDTM55494.2023.10103112