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1 Ergebnisse
1
Indirect Excitation of micro-HRG Using Segmented Piezoelect..:
, In:
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
,
Wang, Danmeng
;
Strnad, Nicholas A.
;
Wang, Yusheng
... - p. 1-4 , 2023
Link:
https://doi.org/10.1109/INERTIAL56358.2023.10103950
RT T1
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
: T1
Indirect Excitation of micro-HRG Using Segmented Piezoelectric ALD PHT Actuator
UL https://suche.suub.uni-bremen.de/peid=ieee-10103950&Exemplar=1&LAN=DE A1 Wang, Danmeng A1 Strnad, Nicholas A. A1 Wang, Yusheng A1 Parrish, Austin R. A1 Benoit, Robert R. A1 Knight, Ryan R. A1 Shkel, Andrei M. YR 2023 SN 2377-3480 K1 Q-factor K1 Fabrication K1 Wafer bonding K1 Vibrations K1 Actuators K1 X-ray scattering K1 Piezoelectric materials K1 Fused Quartz K1 Hemispherical Resonator Gyroscope K1 Dual-Shell Gyroscope K1 Metallization K1 Quality factor K1 Piezoelectric K1 ALD PHT SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/INERTIAL56358.2023.10103950 DO https://doi.org/10.1109/INERTIAL56358.2023.10103950 SF ELIB - SuUB Bremen
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