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REDUCING THERMO-ELASTIC DAMPING OF MEMS RESONATORS USING A ..:

, In: 2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL),
Tang, Chen ; Wu, Zhiheng ; Heller, Martin... - p. 1-4 , 2023
Link: https://doi.org/10.1109/INERTIAL56358.2023.10103974