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1 Ergebnisse
1
Out of Plane Double Differential Quadrature Compensation El..:
, In:
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
,
Fedeli, P.
;
Falorni, L.
;
Yallico Sanchez, G. J.
.. - p. 1-4 , 2023
Link:
https://doi.org/10.1109/INERTIAL56358.2023.10103994
RT T1
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
: T1
Out of Plane Double Differential Quadrature Compensation Electrodes with ThELMA-Double Technology
UL https://suche.suub.uni-bremen.de/peid=ieee-10103994&Exemplar=1&LAN=DE A1 Fedeli, P. A1 Falorni, L. A1 Yallico Sanchez, G. J. A1 Riani, M. A1 Gattere, G. YR 2023 SN 2377-3480 K1 Electrodes K1 Micromechanical devices K1 Simulation K1 Prototypes K1 Micromachining K1 Stability analysis K1 Numerical models K1 MEMS K1 Gyroscope K1 ThELMA-Double K1 Quadrature Compensation K1 Scale Factor Stability SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/INERTIAL56358.2023.10103994 DO https://doi.org/10.1109/INERTIAL56358.2023.10103994 SF ELIB - SuUB Bremen
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