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1 Ergebnisse
1
Towards accurate temperature prediction in BEOL for reliabi..:
, In:
2023 IEEE International Reliability Physics Symposium (IRPS)
,
Lofrano, Melina
;
Oprins, Herman
;
Chang, Xinyue
... - p. 1-7 , 2023
Link:
https://doi.org/10.1109/IRPS48203.2023.10117701
RT T1 <cTitle>2023 IEEE International Reliability Physics Symposium (IRPS)</cTitle>: T1 <Title>Towards accurate temperature prediction in BEOL for reliability assessment (Invited)</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10117701&Exemplar=1&LAN=DE A1 Lofrano, Melina A1 Oprins, Herman A1 Chang, Xinyue A1 Vermeersch, Bjorn A1 Pedreira, Olalla Varela A1 Lesniewska, Alicja A1 Cherman, Vladimir A1 Ciofi, Ivan A1 Croes, Kristof A1 Park, Seongho A1 Tokei, Zsolt YR 2023 SN 1938-1891 K1 Temperature measurement K1 Heating systems K1 Couplings K1 Temperature distribution K1 Temperature dependence K1 Predictive models K1 Reliability K1 Joule heating K1 self-heating K1 advanced interconnect K1 BEOL K1 FEOL K1 Airgaps K1 Finite element modeling SP 1 OP 7 LK http://dx.doi.org/https://doi.org/10.1109/IRPS48203.2023.10117701 DO https://doi.org/10.1109/IRPS48203.2023.10117701 SF ELIB - SuUB Bremen
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