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1 Ergebnisse
1
Polarity Dependency of MOL-TDDB in FinFET:
, In:
2023 IEEE International Reliability Physics Symposium (IRPS)
,
Sharma, Manisha
;
Park, Hokyung
;
Zhao, Yinghong
... - p. 1-3 , 2023
Link:
https://doi.org/10.1109/IRPS48203.2023.10117774
RT T1 <cTitle>2023 IEEE International Reliability Physics Symposium (IRPS)</cTitle>: T1 <Title>Polarity Dependency of MOL-TDDB in FinFET</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10117774&Exemplar=1&LAN=DE A1 Sharma, Manisha A1 Park, Hokyung A1 Zhao, Yinghong A1 Lee, Ki-Don A1 Chen, Liangshan A1 Yoon, Joonah A1 Ranjan, Rakesh A1 Kwon, Caleb Dongkyan A1 Shim, Hyewon A1 Yeo, Myung Soo A1 Chung, Shinyoung A1 Haefner, Jon YR 2023 SN 1938-1891 K1 Electron traps K1 Logic gates K1 FinFETs K1 Dielectrics K1 Dielectric breakdown K1 Reliability K1 High-k dielectric materials K1 Polarity K1 Middle of line K1 Conduction Mechanism K1 High-k K1 MOL-TDDB SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/IRPS48203.2023.10117774 DO https://doi.org/10.1109/IRPS48203.2023.10117774 SF ELIB - SuUB Bremen
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