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1 Ergebnisse
1
Impact of Gate Stack Thermal Budget on NBTI Reliability in ..:
, In:
2023 IEEE International Reliability Physics Symposium (IRPS)
,
Zhou, Huimei
;
Wang, Miaomiao
;
Loubet, Nicolas
.. - p. 1-6 , 2023
Link:
https://doi.org/10.1109/IRPS48203.2023.10117828
RT T1 <cTitle>2023 IEEE International Reliability Physics Symposium (IRPS)</cTitle>: T1 <Title>Impact of Gate Stack Thermal Budget on NBTI Reliability in Gate-All-Around Nanosheet P-type Devices</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10117828&Exemplar=1&LAN=DE A1 Zhou, Huimei A1 Wang, Miaomiao A1 Loubet, Nicolas A1 Gaul, Andrew A1 Sulehria, Yasir YR 2023 SN 1938-1891 K1 Negative bias temperature instability K1 Degradation K1 Annealing K1 Gallium arsenide K1 Modulation K1 Logic gates K1 Thermal analysis K1 GAA K1 Nanosheet (NS) K1 NBTI SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.1109/IRPS48203.2023.10117828 DO https://doi.org/10.1109/IRPS48203.2023.10117828 SF ELIB - SuUB Bremen
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