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Protection Schemes for Plasma Induced Damage from Well-Side..:

, In: 2023 IEEE International Reliability Physics Symposium (IRPS),
Kuo, Hsi-Yu ; Chu, Yu-Lin ; Dai, Hung-Da... - p. 1-5 , 2023
Link: https://doi.org/10.1109/IRPS48203.2023.10117947