I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Maximizing Efficiency of Inspection tools using a novel hig..:
, In:
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Ali, Rehab Kotb
;
Olivier Moulis, Sylvain
;
Entradas, Jorge
.. - p. 1-5 , 2023
Link:
https://doi.org/10.1109/ASMC57536.2023.10121075
RT T1
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
: T1
Maximizing Efficiency of Inspection tools using a novel high capacity unsupervised machine learning technique
UL https://suche.suub.uni-bremen.de/peid=ieee-10121075&Exemplar=1&LAN=DE A1 Ali, Rehab Kotb A1 Olivier Moulis, Sylvain A1 Entradas, Jorge A1 El Abidine, Nacer Zine A1 Hong, Le YR 2023 SN 2376-6697 K1 Semiconductor device modeling K1 Semiconductor device measurement K1 Machine learning algorithms K1 Machine learning K1 Inspection K1 Semiconductor device manufacture K1 Size measurement K1 Inspection tools K1 IC manufacturing K1 model calibration K1 Hot spot detection SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/ASMC57536.2023.10121075 DO https://doi.org/10.1109/ASMC57536.2023.10121075 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)