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Maximizing Efficiency of Inspection tools using a novel hig..:
, In:
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Ali, Rehab Kotb
;
Olivier Moulis, Sylvain
;
Entradas, Jorge
.. - p. 1-5 , 2023
Link:
https://doi.org/10.1109/ASMC57536.2023.10121075
RT T1 <cTitle>2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Maximizing Efficiency of Inspection tools using a novel high capacity unsupervised machine learning technique</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10121075&Exemplar=1&LAN=DE A1 Ali, Rehab Kotb A1 Olivier Moulis, Sylvain A1 Entradas, Jorge A1 El Abidine, Nacer Zine A1 Hong, Le YR 2023 SN 2376-6697 K1 Semiconductor device modeling K1 Semiconductor device measurement K1 Machine learning algorithms K1 Machine learning K1 Inspection K1 Semiconductor device manufacture K1 Size measurement K1 Inspection tools K1 IC manufacturing K1 model calibration K1 Hot spot detection SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/ASMC57536.2023.10121075 DO https://doi.org/10.1109/ASMC57536.2023.10121075 SF ELIB - SuUB Bremen
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