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A Role of N2 and O2 Gasses in Post Etch Treatment (PET) for..:

, In: 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Ye, Jeff J. ; Lien, Wan-Ping ; Chen, San - p. 1-5 , 2023
Link: https://doi.org/10.1109/ASMC57536.2023.10121087