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Graphical approach of equipment health monitoring using net..:
, In:
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Ki, Wanwook
;
Choi, Minjae
;
Lee, Yongjun
... - p. 1-4 , 2023
Link:
https://doi.org/10.1109/ASMC57536.2023.10121092
RT T1 <cTitle>2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Graphical approach of equipment health monitoring using network analysis</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10121092&Exemplar=1&LAN=DE A1 Ki, Wanwook A1 Choi, Minjae A1 Lee, Yongjun A1 Park, Jisoo A1 Yoon, Kiseop A1 Hwang, Hanchan A1 Kang, Taewook A1 Park, Jaeyong A1 Kim, Younghoon YR 2023 SN 2376-6697 K1 Manufacturing processes K1 Semiconductor devices K1 Data visualization K1 Network analyzers K1 Semiconductor device manufacture K1 Behavioral sciences K1 Manufacturing K1 Equipment health monitoring K1 Network K1 WGCNA K1 Sensor correlation SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/ASMC57536.2023.10121092 DO https://doi.org/10.1109/ASMC57536.2023.10121092 SF ELIB - SuUB Bremen
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