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1 Ergebnisse
1
Adaptive Online Time-Series Prediction for Virtual Metrolog..:
, In:
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Zabrocki, Simon
;
Jo, Pil Sung
;
Park, Chan
... - p. 1-6 , 2023
Link:
https://doi.org/10.1109/ASMC57536.2023.10121099
RT T1 <cTitle>2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Adaptive Online Time-Series Prediction for Virtual Metrology in Semiconductor Manufacturing</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10121099&Exemplar=1&LAN=DE A1 Zabrocki, Simon A1 Jo, Pil Sung A1 Park, Chan A1 Yim, Dongkyun A1 Yun, Sunghee A1 Lee, Byung-Jun YR 2023 SN 2376-6697 K1 Semiconductor device modeling K1 Pipelines K1 Process control K1 Transforms K1 Production K1 Prediction methods K1 Metrology K1 virtual metrology (VM) K1 advanced process control (APC) K1 time-series prediction K1 data drifts and shifts K1 adaptive learning algorithm SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.1109/ASMC57536.2023.10121099 DO https://doi.org/10.1109/ASMC57536.2023.10121099 SF ELIB - SuUB Bremen
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