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1 Ergebnisse
1
WET Organic Impurities induced Carbon Contamination on Surf..:
, In:
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Wai, Wan Tatt
- p. 1-5 , 2023
Link:
https://doi.org/10.1109/ASMC57536.2023.10121102
RT T1 <cTitle>2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>WET Organic Impurities induced Carbon Contamination on Surface/Sub-surface of Silicon : CFM: Contamination Free Manufacturing</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10121102&Exemplar=1&LAN=DE A1 Wai, Wan Tatt YR 2023 SN 2376-6697 K1 Surface cleaning K1 Spectroscopy K1 Chemistry K1 Impurities K1 Surface contamination K1 Process control K1 Silicon K1 carbon contamination K1 Auger K1 GC-MS K1 organic impurities SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/ASMC57536.2023.10121102 DO https://doi.org/10.1109/ASMC57536.2023.10121102 SF ELIB - SuUB Bremen
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