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1 Ergebnisse
1
Qualification and Optimization of new Post-WCMP Cleaning Ch..:
, In:
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Paul, Samrat
;
Kim, Hong Jin
;
Hanley, Kevin
- p. 1-5 , 2023
Link:
https://doi.org/10.1109/ASMC57536.2023.10121141
RT T1
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
: T1
Qualification and Optimization of new Post-WCMP Cleaning Chemical for ReRAM Process : Topic/category: Equipment Optimization
UL https://suche.suub.uni-bremen.de/peid=ieee-10121141&Exemplar=1&LAN=DE A1 Paul, Samrat A1 Kim, Hong Jin A1 Hanley, Kevin YR 2023 SN 2376-6697 K1 Costs K1 Resistive RAM K1 Tungsten K1 Production K1 Semiconductor device manufacture K1 Cleaning K1 Chemicals SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/ASMC57536.2023.10121141 DO https://doi.org/10.1109/ASMC57536.2023.10121141 SF ELIB - SuUB Bremen
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