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1 Ergebnisse
1
Utilization of ExtractAI™ inspection and review methodology..:
, In:
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Esposito, Teresa A.
;
Mowell, Nathaniel
;
Matham, Shravan
... - p. 1-4 , 2023
Link:
https://doi.org/10.1109/ASMC57536.2023.10121146
RT T1 <cTitle>2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Utilization of ExtractAI™ inspection and review methodology to accelerate process development in advanced technology nodes</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10121146&Exemplar=1&LAN=DE A1 Esposito, Teresa A. A1 Mowell, Nathaniel A1 Matham, Shravan A1 Emans, Susan A1 Islam, Monirul A1 Sheraw, Rebekah A1 Levitov, Felix YR 2023 SN 2376-6697 K1 Machine learning algorithms K1 Inspection K1 Big Data K1 Semiconductor device manufacture K1 Real-time systems K1 Manufacturing K1 Research and development SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/ASMC57536.2023.10121146 DO https://doi.org/10.1109/ASMC57536.2023.10121146 SF ELIB - SuUB Bremen
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