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1 Ergebnisse
1
A Flexible Cluster Tool Simulation Framework with Wafer Bat..:
, In:
2023 24th International Symposium on Quality Electronic Design (ISQED)
,
Yen, Hsin-Ping
;
Huang, Shiuan-Hau
;
Liu, Yan-Hsiu
... - p. 1-8 , 2023
Link:
https://doi.org/10.1109/ISQED57927.2023.10129375
RT T1 <cTitle>2023 24th International Symposium on Quality Electronic Design (ISQED)</cTitle>: T1 <Title>A Flexible Cluster Tool Simulation Framework with Wafer Batch Dispatching Time Recommendation</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10129375&Exemplar=1&LAN=DE A1 Yen, Hsin-Ping A1 Huang, Shiuan-Hau A1 Liu, Yan-Hsiu A1 Tseng, Kuang-Hsien A1 Kung, Ji-Fu A1 Li, Yi-Ting A1 Chen, Yung-Chih A1 Wang, Chun-Yao YR 2023 SN 1948-3295 K1 Semiconductor device modeling K1 Job shop scheduling K1 Manufacturing processes K1 Error analysis K1 Simulation K1 Predictive models K1 Semiconductor device manufacture K1 cluster tool K1 simulation K1 wafer transferring system SP 1 OP 8 LK http://dx.doi.org/https://doi.org/10.1109/ISQED57927.2023.10129375 DO https://doi.org/10.1109/ISQED57927.2023.10129375 SF ELIB - SuUB Bremen
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